This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: ac semiconductor equipment simulation ac process modeling and simulation ac device modeling and simulation of complex structures ac interconnect modeling ac integrated systems for process, device, circuit simulation and optimisation ac numerical methods and algorithms ac compact modeling and parameter extraction ac modeling for RF applications ac simulation and modeling of new devices (heterojunction based, SETas, quantum effect devices, laser based ...)technology development engineer will use the tools as naturally and successfully as a circuit designer uses SPICE simulation and ... [4] aquot;TSUPREM-4, Two- dimensional process simulation program, aquot; Version 6.5, Usera#39;s Manual, Technology Modeling Associates, May, 1997. ... 270, pp. 584-585, San Diego, CA , 1995. [13] D. Tang, P. Wang, V. Speriosu, S. Le, R. Fontana, and S. Rishton, aquot;An IC processanbsp;...
Title | : | Simulation of Semiconductor Processes and Devices 1998 |
Author | : | Kristin De Meyer, Serge Biesemans |
Publisher | : | Springer Science & Business Media - 2012-12-06 |
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